Kalrez® Semiconductor O-Ring
Compound Selection Guide
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|Kalrez® Sahara 8375
The newest addition to the Sahara family of ultrapure products. This compound is formulated using a special blend of white filler that enables it to withstand the most severe dry and plasma processing environments. This white compound has been optimized for low weight loss and low particle generation in bothO2 and fluorine plasmas. Its combination of high temperature performance, mechanical properties, and low compression set characteristics make it an excellent choice for both static and dynamic dry process seal applications (e.g., gate valves, door seals, chamber lid seals, etc.). A maximum continuous service temperature of 300°C (572°F) is suggested. Static and dynamic service in all dry chemicals and plasmas. Ultrapure post-cleaning and packaging is standard for all parts made of compound 8375.
|Kalrez® Sahara 8385
The original compound in the Sahara family of products developed as a result of ongoing efforts in partnership with key industry OEMs and fabs. Is exhibits excellent resistance to plasma and dry process chemistries. This 83 Durometer white compound has good mechanical properties and excellent vacuum sealing performance and is well suited for many static and dynamic applications (e.g., quartz tube seals, door seals, lip seals, etc.). A maximum continuos service temperature of 275°C (527°F) is suggested. Static and dynamic service in all dry chemicals and plasmas. Ultrapure post-cleaning and packaging is standard for all parts made of compound 8385.
|Kalrez® Sahara 8575
The newest addition to the Sahara
family of ultrapure products. This compound,specially formulated for improved
performance in etch, CVD and strippingprocesses, offers lower cost of ownership with
reduced contamination and longer seal life. This white perfluoroelastomer compound
utilizes a new proprietary polymer and crosslinking system. It builds on the
excellent plasma resistance of Kalrez Sahara 8375 with reduced weight loss, particle
generation and outgassing, as well asimproved elastic recovery properties. Sahara
Plasma 8575 offers excellent resistance to both O2 and fluorine plasma as wellas
chlorinatedcleaning gasses (e.g., CIF3),
exhibits axcellent vacuum and long term sealing performance, has good mechanical
properties and is well-suited for both static and dynamic dry process seal applications
(slit valve doors, chamber lids, gas inlets, ect) It's maximum continuous service
temperature rating of 280°C (536°F) is well above the typical requirements for seals
used in these processes. Ultrapure post-cleaning and packaging is standard for all
parts made of Plasma 8575.
Offers excellent compression set characteristic for dry chemical processes and plasma environments. Its high service temperature rating, low outgassing characteristics, and low hardness make it well suited for vacuum service and low stress/low sealing force static applications. A maximum continuos service temperature of 300°C (572°F) is suggested. Static and low stress service in all dry chemicals and plasmas. Ultrapure post-cleaning and packaging is standard for all parts manufactured using compound 8101
Specially formulated for wet chemical process applications. In addition to its excellent resistance to Pirahna, UPDI, and other wafer etching, cleaning, and stripping chemistries, compound 8201 features lower elemental, anionic, and total organic carbon extractable than competitive perfluoroelastomer. A maximum continuos service temperature of 220°C (428°F) is suggested. Static service for minimal ionic extractable in all wet media. Ultrapure post-cleaning and packaging is standard for all parts made of compound 8201.
|Indusrtrial Compounds sometimes used in Semiconductor Applications|
A low compression set compound for general-purpose use in O-rings, diaphragms, seals, and other parts used in the process and aircraft industries, as well as many wet and dry semiconductor process environments. It is a carbon black-filled compound with excellent chemical resistance, good mechanical properties, and outstanding hot air aging properties. It exhibits low swell in organic an inorganic acids and aldehydes and has good response to temperature cycling effects. A maximum operating temperature of 316ºC (600ºF) is recommended, with short excursions to higher temperatures possible. Static and dynamic, high temperature wet and dry, except )2/C12 plasmas. This compound is not recommended for use in hot water/steam applications or in contact with certain hot aliphatic amines, ethylene
A non-black-filled compound that is well suited for selected applications n the pharmaceutical, semiconductor, and other markets that demand high purity elastomers. Compound 2037 has excellent chemical resistance exhibiting low swell in organic acids, inorganic acids, esters, ketones, and aldehydes. it also offers good mechanical properties. A maximum service temperature of 220ºC (428ºF) is recommended. Static and dynamic service in dry chemical up to 200ºC (428ºF).
A non-filled compound, which is well suited for select high purity applications in pharmaceutical, semiconductor, and other markets. It has demonstrated good performance in oxygen and excellent performance in ozone-containing environments. its high service temperature rating and low harness make it well suited for vacuum service and low stress.low sealing force static applications. A maximum continuos service temperature of 275ºC (527ºF) is suggested. Static service in ozone-rich media and low seal force applications. Ultrapure post-cleaning and packaging is optional
A general-purpose compound for O-rings, seals, and other parts used in chemical process industries. Its is also recommended for use in select semiconductor wet process applications where high concentrations of certain amines are present. It has good hot water/steam, excellent amine resistance, and enhanced compression set properties. Maximum recommended service temperature of 288ºC (527ºF). Special applications; wet amine media or low outgassing at high temperature. Not recommended for use in organic or inorganic acids at high temperatures.
Typical Physical Properties
|Comr. Set at 70 hr, 204°C (400°F)||Filler System|
|Sahara 8375||White||76||300 (572)||5.1 (740)||20||Special Blend, white fillers|
|Sahara 8385||White||83||275 (527)||8.6 (1,250)||35||Special Blend, white fillers|
|Sahara 8575||White||74||280 (536)||2.5 (360)||29||Special Blend, white fillers|
|8101||Gray||65||300 (572)||2.3 (300)||18||Nonreactive filler|
|8201||Brown||79||220 (428)||4.5 (590)||29||Unfilled|
|4079||Black||75||316 (600)||7.2 (1,050)||25||Carbon black filled|
|2037||White||79||220 (428)||6.2 (900)||27||Mineral filled|
|4001||Black||58||275 (527)||1.4 (210)||13||Unfilled - Soft|
|1050LF||Black||82||288 (550)||12.4 (1,800)||35||Carbon black filled|
The information set forth herein is furnished free of charge and is based on technical data that DuPont Dow Elastomers believes to be reliable. It is intended for use by persons having technical skill, at their own discretion and risk. The handling precaution information contained herein is given with the understanding that those using it will satisfy themselves that their particular conditions of use present no health or safety hazards. Because conditions of product use and disposal are outside our control, we make no warranties, express or implied, and assume no liability in connection with any use of this information. As with any material, evaluation of any compound under end-use conditions prior to specification is essential. Nothing herein is to be taken as a license to operate under or a recommendation to infringe on any patents.
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Vespel® is a registered trademark of DuPont
Vespel* is a registered trademark of DuPont
Viton and Kalrez are a registered trademark of DuPont Performance Elastomers
Altymid® and Chemraz® are a registered trademark of Green Tweed
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