Semiconductor Grade Polyimide Plastics

Featuring Altymid® the Vespel® Alternatve

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Altymid® Polyimide
Application Data

  • LOW ETCH RATE

  • LOW EXTRACTABLES

  • COST EFFECTIVENESS

  • EXCELLENT ELECTRICAL PROPERTIES

  • EXCELLENT MECHANICAL PROPERTIES

  • SERVICE TEMPERATURE UP TO 300ºC

semialtymidphoto.jpg (5606 bytes)

ALTYMID® 750
TYPICAL PHYSICAL PROPERTIES

PROPERTIES ALTYMID® 750 Units ASTM Method
Tensile Strength 9,500 psi D-638
Elongation 4.5 % D-638
Flex Strength 13,500 psi D-790
Flex Modulus 400,000 psi D-790
Coeffiecient of Linear
Thermal Expansion
(0-572ºF)
(572ºF - 77ºF)


2.67 x 10-5
2.74 x 10-5
in/in/ºF E228
Specific Gravity 1.42    
Hardness 84
93
Shore D
Rockwell M
D-2240
D-785
Dielectric Strength
Short Time
433
(121 mils thick)
V/mil D-149
Dielectric Constant
100 HZ
10 KHZ
1 MHZ

3.03
3.02
3.22
  D-150
Surface Resistivity 7.13 x 1015 Ohms D-257
Volume Resistivity 1.03 x 1016

Ohm-m

D-257

 

 

WEIGHT CHANGE COMPARISON

Weight Change Comparison 1.TIF (81398 bytes)

PLASMA TEST
Silicide etching            WSi
Chemistry:                    CI2/O2/N2
Pressure (mTorr):         4
Power RF (Watts):        700
Bias RF (Volts):           100
Exposure Time (sec):   600
RATE (g/sec)
Compound Pre-Weight (g) Post-Weight (g) Weight gain/loss x E-06
Altymid 750 0.14034 0.14020 -0.00014 -0.23
Vespel* SP-1 0.12993 0.12925 -0.00068 -1.13

 

Weight Change Comparison 2.TIF (81466 bytes)

PLASMA TEST
Silicide etching            WSi
Chemistry:                    CI2/SF6/O2/N2
Pressure (mTorr):         4
Power RF (Watts):        500
Bias RF (Volts):           100
Exposure Time (sec):   600
RATE (g/sec)
Compound Pre-Weight (g) Post-Weight (g) Weight gain/loss x E-06
Altymid 750 0.14034 0.14020 -0.00014 -0.23
Vespel* SP-1 0.12993 0.12925 -0.00068 -1.13

 

 

ALTYMID® 750
ELEMENT BULK ANALYSIS

ELEMENT

AMOUNT

UNITS

Antimony

6.3

ppb

Arsenic

2.4

ppb

Barium

1.6

ppb

Bromine

458

ppb

Cadmium

210

ppb

Cerium

39

ppb

Cesium

13

ppb

Chromium

 878

ppb

Cobalt

24

ppb

Europium

5.9

ppb

Gold

0.15

ppb

Hafnium

6.8

ppb

Iridium

0.26

ppb

Iron

6200

ppb

Lanthanum

2.7

ppb

Lutetium

.43

ppb

Molybdenum

25

ppb

Nickel

3000

ppb

Potassium

0.5

ppb

Rubidium

240

ppb

Samarium

0.2

ppb

Scandium

0.9

ppb

Selenium

76

ppb

Silver

38

ppb

Sodium

240

ppb

Tantalum

10

ppb

Tellurium

97

ppb

Terbium

5.3

ppb

Thorium

7.1

ppb

Tin

4200

ppb

Titanium

15

ppb

Tungsten

5.5

ppb

Uranium

8.0

ppb

Ytterbium

2.5

ppb

Zinc

407

ppb

Zirconium

2200

ppb

Tested by Neutron Activation

 

 

ALTYMID® 750
EXTRACTABLE ELEMENTS IN UPDI WATER @ 80ºC FOR 14 DAYS

ELEMENT

AMOUNT

DETECTION LIMIT

UNITS

Aluminium

0.21

0.05

ppm

Antimony

*

0.02

ppm

Arsenic

*

0.20

ppm

Barium

*

1.01

ppm

Beryllium

*

0.04

ppm

Bismuth

*

0.04

ppm

Boron

*

0.50

ppm

Cadmium

 *

0.03

ppm

Calcium

*

3.0

ppm

Cerium

*

0.01

ppm

Cesium

*

0.02

ppm

Chromium

*

0.03

ppm

Cobalt

*

0.02

ppm

Copper

0.07

0.05

ppm

Dysprosium

*

0.04

ppm

Erbium

*

0.02

ppm

Europium

*

0.02

ppm

Gadolinium

*

0.04

ppm

Gallium

*

0.04

ppm

Germanium

*

0.05

ppm

Gold

*

0.05

ppm

Hafnium

*

0.03

ppm

Holmium

*

0.01

ppm

Indium

*

0.02

ppm

Iridium

*

0.06

ppm

Iron

5.30

0.10

ppm

Lanthanum

*

0.01

ppm

Lead

*

0.05

ppm

Lithium

*

0.03

ppm

Lutetium

*

0.01

ppm

Magnesium

0.08

0.08

ppm

Manganese

0.19

0.03

ppm

Mercury

*

0.05

ppm

Molybdenum

*

0.05

ppm

Neodymium

*

0.02

ppm

Nickel

*

0.05

ppm

Niobium

*

0.02

ppm

Osmium

*

0.02

ppm

Palladium

*

0.06

ppm

Platinum

*

0.08

ppm

Potassium

*

5.0

ppm

Praseodymium

*

0.01

ppm

Rhenium

*

0.06

ppm

Rhodium

*

0.02

ppm

Rubidium

*

0.01

ppm

Ruthenium

*

0.05

ppm

Samarium

*

0.04

ppm

Scandium

*

0.20

ppm

Selenium

*

7.0

ppm

Silicon

*

50

ppm

Silver

*

0.03

ppm

Sodium

2.7

0.06

ppm

Strontium

*

0.01

ppm

Tantalum

*

0.02

ppm

Tellurium

*

0.04

ppm

Terbium

*

0.02

ppm

Thallium

*

0.05

ppm

Thorium

*

0.02

ppm

Thulium

*

0.01

ppm

Tin

*

0.02

ppm

Titanium

*

0.05

ppm

Tungsten

*

0.02

ppm

Uranium

*

0.02

ppm

Vanadium

*

0.03

ppm

Ytterbium

*

0.03

ppm

Yttrium

*

0.02

ppm

Zinc

0.16

0.06

ppm

Zirconium

*

0.05

ppm

*Element was not found above the detection limit

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